JPS6323705Y2 - - Google Patents
Info
- Publication number
- JPS6323705Y2 JPS6323705Y2 JP1984020849U JP2084984U JPS6323705Y2 JP S6323705 Y2 JPS6323705 Y2 JP S6323705Y2 JP 1984020849 U JP1984020849 U JP 1984020849U JP 2084984 U JP2084984 U JP 2084984U JP S6323705 Y2 JPS6323705 Y2 JP S6323705Y2
- Authority
- JP
- Japan
- Prior art keywords
- hard mask
- holder
- receiving plate
- manufacturing apparatus
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000003595 mist Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984020849U JPS60133455U (ja) | 1984-02-16 | 1984-02-16 | ハ−ドマスク製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984020849U JPS60133455U (ja) | 1984-02-16 | 1984-02-16 | ハ−ドマスク製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133455U JPS60133455U (ja) | 1985-09-05 |
| JPS6323705Y2 true JPS6323705Y2 (en]) | 1988-06-29 |
Family
ID=30511715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984020849U Granted JPS60133455U (ja) | 1984-02-16 | 1984-02-16 | ハ−ドマスク製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133455U (en]) |
-
1984
- 1984-02-16 JP JP1984020849U patent/JPS60133455U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133455U (ja) | 1985-09-05 |
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